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YBa sub 2 Cu sub 3 O sub 7 minus. delta. superconducting films with low microwave surface resistance over large areas

Journal Article · · Applied Physics Letters; (USA)
DOI:https://doi.org/10.1063/1.104244· OSTI ID:6551807
; ; ;  [1];  [2]; ;  [3];  [4]
  1. Conductus, Inc., 969 West Maude Avenue, Sunnyvale, CA (USA)
  2. Hewlett-Packard, 3500 Deer Creek Road, Palo Alto, CA (USA)
  3. Department of Materials Science, Stanford University, Stanford, CA (USA) Department of Applied Physics, Stanford University, Stanford, CA (USA)
  4. Bell Communications Research, Red Bank, NJ (USA)
+ Show Author Affiliations

We demonstrate that {ital in} {ital situ} off-axis sputtering from a composite target can reproducibly fabricate very high quality YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} films over large areas of deposition. A significant reduction in the microwave surface resistance, {ital R}{sub {ital s}}, compared to many previously reported values is found. {ital R}{sub {ital s}} values at 10 GHz were found to be as low as 20 {mu}{Omega} at 4.2 K and 450 {mu}{Omega} at 77 K. A systematic variation of several properties including the transition temperature, critical current density at high magnetic fields, and the {ital c}-axis lattice parameter across the 3.8 cm{times}3.8 cm (14.5 cm{sup 2}) deposition area was found.

OSTI ID:
6551807
Journal Information:
Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 57:5; ISSN APPLA; ISSN 0003-6951
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CURRENTS
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
FILMS
HIGH-TC SUPERCONDUCTORS
LATTICE PARAMETERS
MICROWAVE RADIATION
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIATIONS
SPUTTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SUPERCONDUCTORS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES