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U.S. Department of Energy
Office of Scientific and Technical Information

Union Carbide Corp. polysilicon status and plans

Technical Report ·
OSTI ID:6526191
The status of polysilicon activities is summarized, highlighted by moving the silane portion of the experimental process system development unit (EPSDU) to Washougal, Washington. The completion and operation of the silane EPSDU, is discussed along with research on the silane-to-silicon deposition process. Progress on the dichlorosilane process is also reported.
Research Organization:
Jet Propulsion Lab., Pasadena, CA (USA)
OSTI ID:
6526191
Report Number(s):
N-8310508
Country of Publication:
United States
Language:
English