Union Carbide Corp. polysilicon status and plans
Technical Report
·
OSTI ID:6526191
The status of polysilicon activities is summarized, highlighted by moving the silane portion of the experimental process system development unit (EPSDU) to Washougal, Washington. The completion and operation of the silane EPSDU, is discussed along with research on the silane-to-silicon deposition process. Progress on the dichlorosilane process is also reported.
- Research Organization:
- Jet Propulsion Lab., Pasadena, CA (USA)
- OSTI ID:
- 6526191
- Report Number(s):
- N-8310508
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501 -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
CRYSTALS
ELEMENTS
FUNCTIONAL MODELS
HYDRIDES
HYDROGEN COMPOUNDS
PILOT PLANTS
POLYCRYSTALS
RESEARCH PROGRAMS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
140501 -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
CRYSTALS
ELEMENTS
FUNCTIONAL MODELS
HYDRIDES
HYDROGEN COMPOUNDS
PILOT PLANTS
POLYCRYSTALS
RESEARCH PROGRAMS
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS