Development of a polysilicon process based on chemical vapor deposition (Phase 1 and Phase 2). Final report, 6 October 1979-25 June 1982

Technical Report · Sun Aug 01 04:00:00 EDT 1982

DOI:https://doi.org/10.2172/5584216· OSTI ID:5584216

Plahutnik, F.; Arvidson, A.; Sawyer, D.; Sharp, K.

The goal of this program was to demonstrate that a dichlorosilane based reductive chemical vapor deposition (CVD) process is capable of producing a high-purity, low-cost polycrystalline silicon. Physical form and purity of this material was to be consistent with FSA material requirements for manufacturing high efficiency solar cells. The feasibility phase (Phase 1) provided information through laboratory experiments relating to the kinetics of trichlorosilane redistribution, catalyst behavior, and decomposition characteristics of dichlorosilane. Of particular importance, Dowex MWA-1 was shown to be an effective redistribution catalyst at moderate temperatures and very few reactor related operational problems were observed during dichlorosilane decomposition. The demonstration phase (Phase 2) evaluated technology developed during Phase 1 at a dichlorosilane production and decomposition scale sufficient to allow scale-up for the Experimental Process System Development Unit (EPSDU). Catalyst life, polysilicon deposition rate, and product purity were established as acceptable in addition to defining process limitations. An economic analysis was completed for a 1000 metric ton per year commercial facility using Hemlock Semiconductor's Polysilicon Process Based On Chemical Vapor Deposition. This analysis indicated that polycrystalline silicon of semiconductor quality could be produced at a price of $20.27 per kilogram.

• Research Organization: Hemlock Semiconductor Corp., MI (USA)
• DOE Contract Number: NAS-7-100-955533
• OSTI ID: 5584216
• Report Number(s): DOE/JPL/955533-83/7; ON: DE84004975
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
CATALYSTS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
DEPOSITION
DIRECT ENERGY CONVERTERS
ECONOMIC ANALYSIS
ECONOMICS
ELEMENTS
EQUIPMENT
FEASIBILITY STUDIES
FUNCTIONAL MODELS
HYDRIDES
HYDROGEN COMPOUNDS
KINETICS
PERFORMANCE
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PROCESS DEVELOPMENT UNITS
SAFETY
SEMIMETALS
SILANES
SILICON
SILICON COMPOUNDS
SILICON SOLAR CELLS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING