Experimental study of precipitation in an ion-implanted metal: Sb in Al

Journal Article · Mon Jan 01 04:00:00 EST 1979 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.325702· OSTI ID:6511315

Kant, R A; Myers, S M; Picraux, S T

The formation and evolution of AlSb precipitates in Sb-implanted Al has been investigated as a function of temperature, flux, and fluence. Implant temperatures of 23--300 /sup 0/C, fluxes of 6 x 10/sup 11/ to 1.3 x 10/sup 13/ Sb cm/sup -2/ sec/sup -1/, and fluences of 5 x 10/sup 15/ to 2 x 10/sup 17/ Sb cm/sup -2/ were investigated, and transmission electron microscopy was used to detect the precipitates and to determine their size distributions. The AlSb precipitate mean size becomes larger and the number density decreases with increasing Sb implantation temperature, with increasing fluence, and with decreasing flux. The temperature and flux dependences of the evolution are large for 5 x 10/sup 15/ Sb cm/sup -2/ added to initially pure Al, and are much weaker at higher fluences where 1.5 x 10/sup 15/ Sb cm/sup -2/ has been added to a preexisting precipitate distribution. This indicates that flux and temperature affect the size distribution most strongly during nucleation and/or early growth. Ion damage has been demonstrated to be a significant factor in the precipitate evolution through Ar and Al bombardment of preexisting precipitates. At 300 /sup 0/C self-ion bombardment leads to ripening, whereas the precipitate size distribution is stable in the absence of implantation. At room temperature, Ar irradiation causes the AlSb diffraction pattern to disappear at approx.1 displacement per atom (dpa) independent of precipitate size, suggesting that here destruction of precipitates occurs due to disordering of the AlSb lattice. The results are discussed in terms of thermal and irradiation-induced processes.

• Research Organization: Sandia Laboratories, Albuquerque, New Mexico 87185
• OSTI ID: 6511315
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 50:1; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360106* -- Metals & Alloys-- Radiation Effects
ALLOYS
ALUMINIUM
ALUMINIUM ALLOYS
ANTIMONY ALLOYS
ANTIMONY IONS
ARGON
ATOMIC IONS
CHARGED PARTICLES
ELECTRON MICROSCOPY
ELEMENTS
ION IMPLANTATION
IONS
IRRADIATION
METALS
MICROSCOPY
NONMETALS
PHYSICAL RADIATION EFFECTS
PNICTIDES
PRECIPITATION
RADIATION EFFECTS
RARE GASES
SEPARATION PROCESSES
TEMPERATURE DEPENDENCE