Sputter deposition of yttria-stabilized zirconia onto a porous Au substrate
- Lawrence Livermore National Laboratory, University of California, Livermore, California 94550 (United States)
Process issues key to thin-film/solid--oxide fuel cells include the deposition of defect-free electrolyte layers on porous electrodes, gas transport through the porous conducting electrodes, and sufficient structural integrity for stack assembly and temperature cycling. This study addresses the method of electrolyte layer deposition. Our initial approach uses a porous metal substrate to permit measurement of the electrolyte performance as well as provide a pore size similar to conventional cermet electrodes. The sputter deposition of Au under controlled process parameters provides the porous substrate. An optimum choice for the electrolyte material is yttria-stabilized zirconia (YSZ). Our focus is to evaluate the process parameters of rf sputtering a YSZ target to densely coat the porous (Au) substrate. A high sputter gas pressure of Argon facilitates filling surface voids of the porous substrate leading to the formation of a defect-free layer of cubic YSZ as examined with electron microscopy techniques. {copyright} {ital 1995} {ital American} {ital Vacuum} {ital Society}
- Research Organization:
- Lawrence Livermore National Laboratory
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 64936
- Journal Information:
- Journal of Vacuum Science and Technology, A, Journal Name: Journal of Vacuum Science and Technology, A Journal Issue: 3 Vol. 13; ISSN JVTAD6; ISSN 0734-2101
- Country of Publication:
- United States
- Language:
- English
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