Application of reflection mass spectrometry to molecular-beam epitaxial growth of InAlAs and InGaAs
Reflection mass spectrometry (REMS) has been used to monitor In fluxes leaving the surface, and to optimize growth conditions during molecular-beam epitaxial (MBE) growth of InAlAs and InGaAs on InP. The optical, electrical, and structural properties of the films are shown to be a function of the measured indium signal. This optimization technique is independent of thermocouple or pyrometer readings to set the growth temperature, and has led to significant improvements in the optical and electrical properties of lattice matched InAlAs on InP. REMS-optimized unintentionally doped InAlAs has been grown with electron concentrations as low as 3 x 10/sup 15//cm/sup 3/, electron mobilities as high as 4 000 cm/sup 2//V s at 77 K, and photoluminescence linewidths as narrow as 10 meV. The high quality of these layers is attributed to reduced alloy clustering and reduced ionized impurity scattering.
- Research Organization:
- Sandia National Laboratories, Albuquerque, New Mexico 87185-5800
- OSTI ID:
- 6482931
- Journal Information:
- J. Vac. Sci. Technol., B; (United States), Vol. 7:2
- Country of Publication:
- United States
- Language:
- English
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Investigations on the MBE (molecular beam epitaxy) growth and properties of Al/sub y/Ga/sub y/In/sub 1-x-y/AsInP and InGaAs-InAlAs superlattices: Progress report for the period February 1, 1987-December 31, 1987
Device quality InGaAs/InAlAs/InP heterostructures grown by gas source molecular beam epitaxy
Related Subjects
ALUMINIUM ARSENIDES
MOLECULAR BEAM EPITAXY
GALLIUM ARSENIDES
INDIUM ARSENIDES
INDIUM PHOSPHIDES
SORPTIVE PROPERTIES
OPTIMIZATION
AUGMENTATION
CRYSTAL STRUCTURE
ELECTRICAL PROPERTIES
ELECTRON MOBILITY
INDIUM
LINE WIDTHS
LOW TEMPERATURE
MASS SPECTROSCOPY
OPTICAL PROPERTIES
PHOTOLUMINESCENCE
REFLECTION
THIN FILMS
USES
ALUMINIUM COMPOUNDS
ARSENIC COMPOUNDS
ARSENIDES
ELEMENTS
EPITAXY
FILMS
GALLIUM COMPOUNDS
INDIUM COMPOUNDS
LUMINESCENCE
METALS
MOBILITY
PARTICLE MOBILITY
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PHYSICAL PROPERTIES
PNICTIDES
SPECTROSCOPY
SURFACE PROPERTIES
360601* - Other Materials- Preparation & Manufacture
360603 - Materials- Properties
360602 - Other Materials- Structure & Phase Studies