Performance of the RHIC-II clean room facility at Sandia National Laboratories

Conference · Thu Dec 31 23:00:00 EST 1987

OSTI ID:6477743

Brown, N E; Van Geet, O D; Liu, B Y.H.; O'Hanlon, J F

The clean rooms in the new Radiation Hardened Integrated Circuit (RHIC-II) Facility have become operational. Design philosophy and information on the air handling system, initial data on particulate contamination levels in clean bays, service chases and the make up air system will be presented. Data on power consumption, particulate levels before and after the HEPA filters and sound levels with air velocities from 95 to 57 feet per minute will be reported. 2 refs., 5 figs., 4 tabs.

• Research Organization: Sandia National Labs., Albuquerque, NM (USA)
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6477743
• Report Number(s): SAND-89-0615C; CONF-8811182-1; ON: DE89008579
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420200* -- Engineering-- Facilities
Equipment
& Techniques
AIR CLEANING SYSTEMS
AIR FILTERS
AIR QUALITY
CLEAN ROOMS
ELECTRONIC CIRCUITS
ENGINEERED SAFETY SYSTEMS
ENVIRONMENTAL QUALITY
EQUIPMENT
FILTERS
HARDENING
INTEGRATED CIRCUITS
MEASURING METHODS
MICROELECTRONIC CIRCUITS
NATIONAL ORGANIZATIONS
PARTICLES
PARTICULATES
PHYSICAL RADIATION EFFECTS
POLLUTION CONTROL EQUIPMENT
RADIATION EFFECTS
RADIATION HARDENING
SANDIA LABORATORIES
US AEC
US DOE
US ERDA
US ORGANIZATIONS