(The Radiation-Hardened Integrated Circuit (RHIC) Laboratory: Pursuit of Class 1

Conference · Fri Jan 01 04:00:00 EST 1988

OSTI ID:6956038

DeWitte, M

The Radiation-Hardened Integrated Circuit (RHIC) Laboratory is a research and development facility operated by Sandia National Laboratories for the Department of Energy. This report describes the features of the laboratory in detail. The facility is operated by the Center for Radiation-Hardened Microelectronics (CRM) and supports government clients with the rapid development and pilot production of radiation-hardened ULSI microelectronics. More than 25 years after Sandia's Willis Whitfield invented the first vertical laminar flow clean room, Sandia National Laboratories has once again taken the lead in clean room technology with the design and construction of the RHIC facility. The building was designed to support wafer fabrication of ULSI integrated circuits through the 1990's. The facility consists of 12,000 s.f. (net) Ultra-Clean Room in a bay and chase configuration. The 174,000 s.f. building houses the majority of the Sandia CRM with 62,000 s.f. dedicated to office and light laboratory, 46,000 s.f. allocated for the clean room bay, chase and equipment repair/service area with the remaining 66,000 s.f. required for central plant and process support space. 4 figs., 1 tab.

• Research Organization: Sandia National Labs., Albuquerque, NM (USA)
• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6956038
• Report Number(s): SAND-88-0545C; CONF-880933-1; ON: DE88006640
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420202* -- Engineering-- Protective Structures & Equipment
AIR FILTERS
BUILDINGS
CLEAN ROOMS
DESIGN
EQUIPMENT
EVALUATION
FILTERS
LABORATORY BUILDINGS
LABORATORY EQUIPMENT
NATIONAL ORGANIZATIONS
OPERATION
POLLUTION CONTROL EQUIPMENT
SANDIA LABORATORIES
US AEC
US DOE
US ERDA
US ORGANIZATIONS