Polycrystalline CVD diamond films with high electrical mobility

Journal Article · Fri May 28 00:00:00 EDT 1993 · Science (Washington, D.C.); (United States)

DOI:https://doi.org/10.1126/science.260.5112.1310· OSTI ID:6467650

Plano, M A; Landstrass, M I; Kania, D R; McWilliams, S ^[1]; Pan, L S; Han, S ^[2]; Ager, III, J W ^[3]

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1. Crystallume, Menlo Park, CA (United States)
2. Lawrence Livermore National Lab., CA (United States)
3. Lawrence Berkeley Lab., CA (United States)

Advances in the deposition process have led to dramatic improvements in the electronic properties of polycrystalline diamond films produced by chemical vapor deposition (CVD). It is now possible to produce CVD diamond with properties approaching those of IIa natural diamonds. The combined electron-hole mobility, as measured by transient photoconductivity at low carrier density, is 4000 square centimeters per volt per second at an electric field of 200 volts per centimeter and is comparable to that of the best single-crystal IIa natural diamonds. Carrier lifetimes measured under the same conditions are 150 picoseconds for the CVD diamond and 300 picoseconds for single-crystal diamond. The collection distance at a field of 10 kilovolts per centimeter is 15 micrometers for the CVD diamond as compared to 30 micrometers for natural diamonds. The electrical qualities appear to correlate with the width of the diamond Raman peak. Also, although the collection distance at the highest fields in the films nearly equals the average grain size, there is no evidence of deleterious grain boundary effects. 20 refs., 3 figs., 2 tabs.

• DOE Contract Number: W-7405-ENG-48; AC03-76SF00098
• OSTI ID: 6467650
• Journal Information: Science (Washington, D.C.); (United States), Vol. 260:5112; ISSN 0036-8075
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
DIAMONDS
CHEMICAL VAPOR DEPOSITION
ELECTRICAL PROPERTIES
POLYCRYSTALS
SILICON
VAPOR DEPOSITED COATINGS
BOUNDARY CONDITIONS
GRAIN BOUNDARIES
CARBON
CHEMICAL COATING
COATINGS
CRYSTALS
DEPOSITION
ELEMENTAL MINERALS
ELEMENTS
MICROSTRUCTURE
MINERALS
NONMETALS
PHYSICAL PROPERTIES
SEMIMETALS
SURFACE COATING
360606* - Other Materials- Physical Properties- (1992-)
360601 - Other Materials- Preparation & Manufacture