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U.S. Department of Energy
Office of Scientific and Technical Information

Thin films of silicon on low-cost substrates. Quarterly report No. 4, 1 October 1977-30 December 1977

Technical Report ·
OSTI ID:6466598
The objective of this research program is to develop a new method for producing self-supporting silicon films utilizing an Energy Beam with low material and energy utilization and at high throughputs. During this quarter a horizontal Energy Beam system was designed, constructed and made operational. In the preliminary experiments, material efficiencies of about 50% were realized in the horizontal deposition system. Theoretical and experimental studies were conducted on the thermal expansion shear separation (TESS) technique. These studies indicated that shear separation is probably occurring in the deposited silicon film. RTR laser recrystallization studies of TESS samples demonstrated a considerable grain size enhancement. Initial economic analyses indicate that the cost of grain enhanced silicon film (100 ..mu..m thick) can be as low as $0.12/watt, based on the Energy Beam deposition and laser recrystallization technologies.
Research Organization:
Motorola, Inc., Phoenix, AZ (USA). Solar Energy Dept.
DOE Contract Number:
AC03-76ET20410
OSTI ID:
6466598
Report Number(s):
DOE/ET/20410-T5; ON: DE81023090
Country of Publication:
United States
Language:
English