Surface analysis of diffusion zones in multiple chemical vapor deposition coatings

Journal Article · Fri Nov 01 04:00:00 EST 1985 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.572851· OSTI ID:6466050

Moore, R L; Salvati, L Jr; Sundberg, G; Greenhut, V

In this investigation, a multilayer carbide coated cutting tool was examined. The cutting tool was produced through the sequential chemical vapor deposition (CVD) of TaC, TiC, Al/sub 2/O/sub 3/, and TiN layers over a WC/Co substrate. The purpose of this study was to characterize the interdiffusion of materials at each of the interfacial regions as a function of deposition conditions. To accomplish this, several surface analysis techniques were used including scanning Auger microscopy (SAM), scanning electron microscopy (SEM), and small spot x-ray photoelectron spectroscopy (XPS). The samples were prepared using a modified lapping technique. The lapping angle used was approx. 0.25/sup 0/, which yielded at least a 250 x expansion of the interfacial regions. This allowed interface characterization without instrumental resolution limitations. Scanning AES and small spot XPS were performed on interfaces to investigate interface chemistry and interdiffusion. Argon sputter depth profiling was also used to further characterize diffusion zone composition and dimension.

• Research Organization: Perkin--Elmer Corporation, Physical Electronics Division, Edison, New Jersey 08820
• OSTI ID: 6466050
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 3:6; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
ATOM TRANSPORT
BONDING
CARBIDES
CARBON COMPOUNDS
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL COMPOSITION
CHEMICAL VAPOR DEPOSITION
COATINGS
COBALT
CUTTING TOOLS
DEPOSITION
DIFFUSION
ELEMENTS
FABRICATION
JOINING
METALS
NEUTRAL-PARTICLE TRANSPORT
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
RADIATION TRANSPORT
REFRACTORY METAL COMPOUNDS
SURFACE COATING
TANTALUM CARBIDES
TANTALUM COMPOUNDS
TITANIUM CARBIDES
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TOOLS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
TUNGSTEN CARBIDES
TUNGSTEN COMPOUNDS
VAPOR DEPOSITED COATINGS