Two-dimensional, self-consistent, three-moment simulation of rf glow discharges

Journal Article · Tue Jun 01 00:00:00 EDT 1993 · IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States)

DOI:https://doi.org/10.1109/27.277557· OSTI ID:6436290

Young, F F; Wu, ChwanHwa J ^[1]

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1. Auburn Univ., AL (United States). Dept. of Electrical Engineering.

A two-dimensional self-consistent nonequilibrium fluid model is used to simulate radio frequency (rf) glow discharges to evaluate the quantitative effects of the radial and axial flow dynamics inside a cylindrically symmetric parallel plate geometry. This model is based on the three moments of the Boltzmann equation and on Poisson's equation. Radial/axial flow dynamics of plasma in low-pressure parallel plate rf glow discharges ar investigated. Instead of uniform profiles along the radial direction, which are assumed in one-dimensional models, nonplate profiles are obtained from the two-dimensional simulations. Ionization rate and three moment distributions of plasma density, average velocity, and mean energy are presented in a two-dimensional configuration. The maximum ionization rate occurs in the radial sheath region and agrees with experimental results. Variations in ion density distributions at different positions, various gas pressures, frequencies, and applied fields are discussed.

• OSTI ID: 6436290
• Journal Information: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States), Journal Name: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States) Vol. 21:3; ISSN ITPSBD; ISSN 0093-3813
• Country of Publication: United States
• Language: English

Related Subjects

661300* -- Other Aspects of Physical Science-- (1992-)
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BOLTZMANN EQUATION
DIFFERENTIAL EQUATIONS
ELECTRIC DISCHARGES
ELECTRODES
EQUATIONS
FLUID MECHANICS
GEOMETRY
GLOW DISCHARGES
IONIZATION
MATHEMATICAL MODELS
MATHEMATICS
MECHANICS
PARTIAL DIFFERENTIAL EQUATIONS
PLASMA DENSITY
POISSON EQUATION
TWO-DIMENSIONAL CALCULATIONS