Two-dimensional modeling of RF methane glow discharge
- Drexel Univ., Philadelphia, PA (United States)
A self-consistent two-dimensional three moment radio frequency glow discharge simulation is performed for methane gas using a fluid model. The main objective of the simulation is to provide a better insight on charged species dynamics and their effect on deposition for a polyatomic discharge. The model incorporates continuity equations for electron, radicals and ion number densities.An electron energy equation is also solved in the model to obtain electron temperature. The swarm data as a function of electron energy are provided as input data in the fluid model. Poisson`s equation is solved to obtained the self-consistent electric field in the domain. The governing equations are solved using a finite-difference numerical scheme. The convective-diffusion terms are discretized by the exponential scheme. The model predictions are compared to experimental measurements obtained from a reactor in the laboratories. The effects of variation of RF voltage, DC bias voltage, pressure, and reactor geometry (electrode radius, and spacing, reactor radius, etc.) on plasma properties are discussed. The model predictions will lead to a better understanding on various deposition processes that are carried out in PACVD reactors using hydrocarbon feed gases.
- OSTI ID:
- 428034
- Report Number(s):
- CONF-960634--
- Country of Publication:
- United States
- Language:
- English
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