A self-consistent particle model for the simulation of RF glow discharges

Journal Article · Sun Mar 31 23:00:00 EST 1991 · IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States)

DOI:https://doi.org/10.1109/27.106809· OSTI ID:5834934

Trombley, H W; Terry, Jr, F L; Elta, M E ^[1]

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1. Michigan Univ., Ann Arbor, MI (United States). Dept. of Electrical Engineering and Computer Science

This paper reports on a self-consistent particle model of an argon RF glow discharge that has been developed. Electric field and charged-particle density profiles determined from simulations with the RF glow discharge model are consistent with results obtained from continuum models. The average ion energy is found to vary greatly between the bulk of the discharge and sheaths, contrary to the assumption that the ion energy is uniform, as is assumed in some continuum models. The accuracy of the particle cross sections and collision representation used in the model is verified with a simplified dc model which calculates swarm parameters. Electron swarm parameters determined with this model are in excellent agreement with experimental data taken from the literature.

• OSTI ID: 5834934
• Journal Information: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States), Journal Name: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States) Vol. 19:2; ISSN 0093-3813; ISSN ITPSB
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
426000* -- Engineering-- Components
Electron Devices & Circuits-- (1990-)
99 GENERAL AND MISCELLANEOUS
990200 -- Mathematics & Computers
ACCURACY
ARGON
COLLISIONS
CROSS SECTIONS
ELECTRIC DISCHARGES
ELECTRIC FIELDS
ELECTRON DENSITY
ELEMENTS
FLUIDS
GASES
GLOW DISCHARGES
ION DENSITY
MATHEMATICAL MODELS
NONMETALS
PLASMA SHEATH
RARE GASES
RF SYSTEMS
SIMULATION