Elucidation of the initial stages of the oxidation of Si(111) using scanning tunneling microscopy and spectroscopy

Journal Article · Wed May 30 20:00:00 EDT 1990 · Journal of Physical Chemistry; (USA)

DOI:https://doi.org/10.1021/j100374a009· OSTI ID:6429358

Lyo, Inwhan; Avouris, Ph ^[1]; Schubert, B; Hoffmann, R ^[2]

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1. T.J. Watson Research Center, Yorktown Heights, NY (USA)
2. Cornell Univ., Ithaca, NY (USA)

We use scanning tunneling microscopy, atom-resolved tunneling spectroscopy, and electronic structure calculations to determine the nature of the adsorption state of oxygen in the initial stages of the oxidation of Si(111). We are able to directly image two states of adsorbed oxygen. One of them is identified as a Si adatom site with one oxygen atom inserted in one of the back bonds, while the other involves an oxygen atom tying up the adatom dangling bond with, most likely, another oxygen inserted in one of the back bonds. As the coverage is increased toward the monolayer, the latter site becomes the dominant one.

• OSTI ID: 6429358
• Journal Information: Journal of Physical Chemistry; (USA), Journal Name: Journal of Physical Chemistry; (USA) Vol. 94:11; ISSN 0022-3654; ISSN JPCHA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360604* -- Materials-- Corrosion
Erosion
& Degradation
ADSORPTION
CHEMICAL REACTIONS
DATA
DATA ANALYSIS
ELEMENTS
EXPERIMENTAL DATA
INFORMATION
MEASURING INSTRUMENTS
MEASURING METHODS
NUMERICAL DATA
OXIDATION
SEMIMETALS
SILICON
SORPTION