Ion-molecule reactions in the silane-ammonia system

Journal Article · Thu May 17 04:00:00 EDT 1990 · Journal of Physical Chemistry; (USA)

DOI:https://doi.org/10.1021/j100373a047· OSTI ID:6428571

Haller, I ^[1]

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1. IBM Thomas J. Watson Research Center, Yorktown Heights, NY (USA)

Fourier transform mass spectrometry was used to investigate the products and rate constants of reactions of ions derived from SiH{sub 4} with ammonia and of ions derived from NH{sub 3} with silane. Eliminative addition and proton transfer are the primary channels observed in the SiH{sub x}{sup +} + NH{sub 3} reactions, while charge- and hydrogen-transfer channels dominate in the NH{sub x}{sup +} + SiH{sub 4} reactions. The SiH{sub x}N{sup +} product ions, unlike analogous ions with silicon backbones, do not react at comparable rates either with silane or with ammonia. This leads to the conclusion that in contrast to pure silane plasmas, ionic chain reactions should contribute little to the mass transport in the silane-ammonia silicon nitride deposition plasmas.

• OSTI ID: 6428571
• Journal Information: Journal of Physical Chemistry; (USA), Journal Name: Journal of Physical Chemistry; (USA) Vol. 94:10; ISSN JPCHA; ISSN 0022-3654
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201* -- Chemical & Physicochemical Properties
AMMONIA
CHARGED PARTICLES
CHEMICAL REACTIONS
DATA
DATA ANALYSIS
EXPERIMENTAL DATA
HYDRIDES
HYDROGEN COMPOUNDS
INFORMATION
IONS
MEASURING INSTRUMENTS
MEASURING METHODS
MOLECULES
NITROGEN COMPOUNDS
NITROGEN HYDRIDES
NUMERICAL DATA
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
SILANES
SILICON COMPOUNDS