Combined photonics and MEMs function demonstration

Conference · Thu Jan 01 04:00:00 EST 1998

OSTI ID:642806

Blum, O; Warren, M E; Hou, H Q; Choquette, K D; Rogers, M S; Sniegowski, J J ^[1]; Carson, R F ^[2]

---

1. Sandia National Labs., Albuquerque, NM (United States)
2. Microoptical Devices, Inc., Albuquerque, NM (United States)

The authors have recently demonstrated two prototypes where photonics and microelectromechanical system (MEMs) technologies have been integrated to show proof-of-principle functionality for weapon surety functions. These activities are part of a program which is exploring the miniaturization of electromechanical components for making weapon systems safer. Such miniaturization can lead to a low-cost, small, high-performance ``systems-on-a-chip``, and have many applications ranging from advanced military systems to large-volume commercial markets like automobiles, rf or land-based communications networks and equipment, or commercial electronics. One of the key challenges in realization of the microsystem is integration of several technologies including digital electronics; analog and rf electronics, optoelectronics (light emitting and detecting devices and circuits), sensors and actuators, and advanced packaging technologies. In this work the authors describe efforts in integrating MEMs and photonic functions and the fabrication constraints on both system components. Here, they discuss two examples of integration of MEMs and a photonic device. In the first instance, a MEMs locking device pin is driven by a voltage generated by photovoltaic cells connected in series, which are driven by a laser. In the second case, a VCSEL emitting at 1.06 {micro}m is packaged together with a metallized MEMs shutter. By appropriate alignment to the opening in the shutter, the VCSEL is turned on and off by the movement of the Si chopper wheel.

• Research Organization: Sandia National Labs., Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 642806
• Report Number(s): SAND--98-0680C; CONF-980117--; ON: DE98003411; BR: YN0100000
• Country of Publication: United States
• Language: English

Related Subjects

45 MILITARY TECHNOLOGY, WEAPONRY, AND NATIONAL DEFENSE
ACTUATORS
LASER RADIATION
MINIATURIZATION
PHOTOVOLTAIC CELLS
RELIABILITY
SEMICONDUCTOR LASERS
SHUTTERS
USES
WEAPONS