Radio Frequency Microelectromechanical Systems [Book Chapter Manuscript]

Nordquist, Christopher; Olsson, Roy H.

doi:10.1002/047134608X.W8229

Radio Frequency Microelectromechanical Systems [Book Chapter Manuscript]

Book · Mon Dec 15 04:00:00 EST 2014

DOI:https://doi.org/10.1002/047134608X.W8229· OSTI ID:1426903

Nordquist, Christopher ^[1]; Olsson, Roy H. ^[2]

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Defense Advanced Research Projects Agency (DARPA), Albuquerque, NM (United States)

Radio frequency microelectromechanical system (RF MEMS) devices are microscale devices that achieve superior performance relative to other technologies by taking advantage of the accuracy, precision, materials, and miniaturization available through microfabrication. To do this, these devices use their mechanical and electrical properties to perform a specific RF electrical function such as switching, transmission, or filtering. RF MEMS has been a popular area of research since the early 1990s, and within the last several years, the technology has matured sufficiently for commercialization and use in commercial market systems.

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Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

DOE Contract Number:: AC04-94AL85000

OSTI ID:: 1426903

Report Number(s):: SAND--2014-16492J; 534434

Country of Publication:: United States

Language:: English

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Noncontact measurement of charge induced voltage shift in capacitive MEM-switches Reid, J. R.; Webster, R. T.; Starman, L. A. IEEE Microwave and Wireless Components Letters, Vol. 13, Issue 9 https://doi.org/10.1109/LMWC.2003.817124	journal	September 2003
Latching micromagnetic relays No authors listed Journal of Microelectromechanical Systems, Vol. 10, Issue 4 https://doi.org/10.1109/84.967373	journal	January 2001
Thin-Film Aluminum RF MEMS Switched Capacitors With Stress Tolerance and Temperature Stability Reines, Isak; Pillans, Brandon; Rebeiz, Gabriel M. Journal of Microelectromechanical Systems, Vol. 20, Issue 1 https://doi.org/10.1109/JMEMS.2010.2090505	journal	February 2011
RF MEMS Testing - Beyond the S-Parameters Ebel, John; Hyman, Daniel; Newman, Harvey IEEE Microwave Magazine, Vol. 8, Issue 6 https://doi.org/10.1109/MMM.2007.907737	journal	December 2007
Figure-of-Merit Enhancement for Laterally Vibrating Lithium Niobate MEMS Resonators No authors listed IEEE Transactions on Electron Devices, Vol. 60, Issue 11 https://doi.org/10.1109/TED.2013.2281734	journal	November 2013
G-Band Micro-Fabricated Frequency-Steered Arrays With 2$^\circ$/GHz Beam Steering Ranzani, Leonardo; Kuester, Daniel; Vanhille, Kenneth J. IEEE Transactions on Terahertz Science and Technology, Vol. 3, Issue 5 https://doi.org/10.1109/TTHZ.2013.2271381	journal	September 2013
Equivalent circuit representation of electromechanical transducers: II. Distributed-parameter systems Tilmans, Harrie A. C. Journal of Micromechanics and Microengineering, Vol. 7, Issue 4 https://doi.org/10.1088/0960-1317/7/4/005	journal	December 1997
Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance Demirci, Mustafa U.; Nguyen, Clark T. -C. Journal of Microelectromechanical Systems, Vol. 15, Issue 6 https://doi.org/10.1109/JMEMS.2006.883588	journal	January 2006
Surface-micromachined RF MEMs switches on GaAs substrates Hyman, Daniel; Lam, Juan; Warneke, Brett International Journal of RF and Microwave Computer-Aided Engineering, Vol. 9, Issue 4 https://doi.org/10.1002/(SICI)1099-047X(199907)9:4<348::AID-MMCE6>3.0.CO;2-K	journal	July 1999
Piezoelectric PZT MEMS technologies for small-scale robotics and RF applications Pulskamp, Jeffrey S.; Polcawich, Ronald G.; Rudy, Ryan Q. MRS Bulletin, Vol. 37, Issue 11 https://doi.org/10.1557/mrs.2012.269	journal	November 2012
Super-high-frequency two-port AlN contour-mode resonators for RF applications Rinaldi, M.; Zuniga, C. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 57, Issue 1 https://doi.org/10.1109/TUFFC.2010.1376	journal	January 2010
Very high frequency channel-select MEMS filters based on self-coupled piezoelectric AlN contour-mode resonators Zuo, Chengjie; Sinha, Nipun; Piazza, Gianluca Sensors and Actuators A: Physical, Vol. 160, Issue 1-2, p. 132-140 https://doi.org/10.1016/j.sna.2010.04.011	journal	May 2010

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36 MATERIALS SCIENCE
42 ENGINEERING
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Radio Frequency Microelectromechanical Systems [Book Chapter Manuscript]

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