MEMS switching of contour-mode aluminum nitride resonators for switchable and reconfigurable radio frequency filters

Nordquist, Christopher D.; Branch, Darren W.; Pluym, Tammy; Choi, Sukwon; Nguyen, Janet H.; Grine, Alejandro J.; Dyck, Christopher W.; Scott, Sean M.; Sing, Molly N.; Olsson, III, Roy H.

doi:10.1088/0960-1317/26/10/104001

MEMS switching of contour-mode aluminum nitride resonators for switchable and reconfigurable radio frequency filters

Journal Article · Wed Aug 31 00:00:00 EDT 2016 · Journal of Micromechanics and Microengineering

DOI:https://doi.org/10.1088/0960-1317/26/10/104001· OSTI ID:1346546

Nordquist, Christopher D. ^[1]; Branch, Darren W. ^[1]; Pluym, Tammy ^[1]; Choi, Sukwon ^[2]; Nguyen, Janet H. ^[3]; Grine, Alejandro J. ^[1]; Dyck, Christopher W. ^[1]; Scott, Sean M. ^[4]; Sing, Molly N. ^[5]; Olsson, III, Roy H. ^[1]

Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
The Pennsylvania State Univ., University Park, PA (United States)
MIT Lincoln Lab., Lexington, MA (United States)
Landauer, Glenwool, IL (United States)
Texas Instruments, Plano, TX (United States)

Switching of transducer coupling in aluminum nitride contour-mode resonators provides an enabling technology for future tunable and reconfigurable filters for multi-function RF systems. By using microelectromechanical capacitive switches to realize the transducer electrode fingers, coupling between the metal electrode finger and the piezoelectric material is modulated to change the response of the device. On/off switched width extensional resonators with an area of <0.2 mm² demonstrate a Q of 2000, K² of 0.72, and >24 dB switching ratio at a resonator center frequency of 635 MHz. As a result, other device examples include a 63 MHz resonator with switchable impedance and a 470 MHz resonator with 127 kHz of fine center frequency tuning accomplished by mass loading of the resonator with the MEMS switches.

View Accepted Manuscript (DOE)

Research Organization:: Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: DARPA; USDOE

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1346546

Alternate ID(s):: OSTI ID: 1528664

Report Number(s):: SAND--2016-6218J; 642883

Journal Information:: Journal of Micromechanics and Microengineering, Journal Name: Journal of Micromechanics and Microengineering Vol. 26; ISSN 0960-1317

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United States

Language:: English

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36 MATERIALS SCIENCE
42 ENGINEERING
aluminum nitride resonators
piezoelectric transducers
radiofrequency microelectromechanical systems
reconfigurable filters

MEMS switching of contour-mode aluminum nitride resonators for switchable and reconfigurable radio frequency filters

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References (17)

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