Electron kinetics of collision dominated R. F. bulk plasma in CO: the role of second-kind collisions

Journal Article · Wed Jun 01 04:00:00 EDT 1988 · Plasma Chem. Plasma Process.; (United States)

DOI:https://doi.org/10.1007/BF01016156· OSTI ID:6419430

Capitelli, M; Celiberto, R; Gorse, C; Winkler, R; Wilhelm, J

Electron energy distribution functions (EEDF) and related properties in the bulk region of the rf CO plasma at the reduced rf field frequency omega/p/sub 0/ = ..pi.. x 10/sup 7/ sec/sup -1/ torr/sup -1/ have been calculated by solving the time-dependent spatially homogeneous Boltzmann equation in the presence of second-kind collisions and have been interpreted on a microphysical basis. The results show that second-kind collisions (vibrational and electronic) strongly affect the temporal evolution of EEDF, of the mean energy, and of the mean collision frequencies for vibrational and electronic excitation processes, as well as for ionization. In particular, second-kind collisions in the CO rf bulk plasma strongly decrease the modulation of the mean ionization frequency during its periodical alteration in the rf field. Furthermore, the effect of second-kind collisions on an approximate determination of the time-averaged EEDF in the rf bulk plasma using the so-called effective-field approximation has been estimated.

• Research Organization: Universita di Bari (Italy)
• OSTI ID: 6419430
• Journal Information: Plasma Chem. Plasma Process.; (United States), Journal Name: Plasma Chem. Plasma Process.; (United States) Vol. 8:2; ISSN PCPPD
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400800* -- Combustion
Pyrolysis
& High-Temperature Chemistry
BOLTZMANN EQUATION
CARBON COMPOUNDS
CARBON MONOXIDE
CARBON OXIDES
CHALCOGENIDES
CHARGED PARTICLES
COLLISIONAL PLASMA
COLLISIONS
DIFFERENTIAL EQUATIONS
DISTRIBUTION FUNCTIONS
ELASTIC SCATTERING
ELECTRIC DISCHARGES
ELECTRON COLLISIONS
ELECTRON-MOLECULE COLLISIONS
ELECTRONS
ELEMENTARY PARTICLES
ENERGY LEVELS
ENERGY SPECTRA
ENERGY-LEVEL TRANSITIONS
EQUATIONS
EXCITATION
EXCITED STATES
FERMIONS
FREQUENCY MODULATION
FUNCTIONS
HIGH-FREQUENCY DISCHARGES
IONIZATION
IONS
KINETICS
LEPTONS
MODULATION
MOLECULAR IONS
MOLECULE COLLISIONS
OXIDES
OXYGEN COMPOUNDS
PARTIAL DIFFERENTIAL EQUATIONS
PLASMA
PLASMA SIMULATION
PRESSURE DEPENDENCE
SCATTERING
SIMULATION
SPECTRA
VELOCITY
VIBRATIONAL STATES