Electron kinetics of weakly ionized collision-dominated rf plasmas in CO

Journal Article · Mon Dec 01 04:00:00 EST 1986 · Plasma Chem. Plasma Process.; (United States)

DOI:https://doi.org/10.1007/BF00565555· OSTI ID:6322125

Winkler, R; Capitelli, M; Dilonardo, M; Gorse, C; Wilhelm, J

Based on the nonstationary electron Boltzmann equation this paper deals with the time-resolved electron kinetics in the rf plasma in CO, i.e., with the calculation of the temporal evolution of the energy distribution and of the resultant macroscopic quantities for the established steady state. A particular aspect of this plasma is the distinctly resonance-like behavior of the vibrational excitation of the CO molecules by electron collisions. This causes the lumped frequencies for energy and impulse dissipation in collisions, recently introduced in the study of the rf kinetics in Ne and H/sub 2/, to become extremely dependent on the electron energy. Despite this fact, it could be verified that the field frequency dependence of the temporal evolution of the electron kinetics can be interpreted by means of these two dissipation frequencies even under such complicated conditions as given by the atomic data in CO.

• Research Organization: Zentralinstitut fuer Elektronenphysik, East Germany
• OSTI ID: 6322125
• Journal Information: Plasma Chem. Plasma Process.; (United States), Journal Name: Plasma Chem. Plasma Process.; (United States) Vol. 6:4; ISSN PCPPD
• Country of Publication: United States
• Language: English

Related Subjects

640304* -- Atomic
Molecular & Chemical Physics-- Collision Phenomena
74 ATOMIC AND MOLECULAR PHYSICS
AMPLITUDES
BEAMS
BOLTZMANN EQUATION
CARBON COMPOUNDS
CARBON MONOXIDE
CARBON OXIDES
CHALCOGENIDES
CHARGED PARTICLES
COLLISIONS
DIFFERENTIAL EQUATIONS
DISTRIBUTION FUNCTIONS
ELASTIC SCATTERING
ELECTRON BEAMS
ELECTRON COLLISIONS
ELECTRON-MOLECULE COLLISIONS
ELECTRONS
ELEMENTARY PARTICLES
ENERGY LEVELS
ENERGY TRANSFER
ENERGY-LEVEL TRANSITIONS
EQUATIONS
EXCITATION
EXCITED STATES
FERMIONS
FLUIDS
FREQUENCY DEPENDENCE
FUNCTIONS
GASES
INELASTIC SCATTERING
IONIZATION
IONIZED GASES
IONS
KINETIC EQUATIONS
KINETICS
LEPTON BEAMS
LEPTONS
MOLECULAR IONS
MOLECULE COLLISIONS
OXIDES
OXYGEN COMPOUNDS
PARTIAL DIFFERENTIAL EQUATIONS
PARTICLE BEAMS
PLASMA PRODUCTION
PLASMA SIMULATION
RESOLUTION
SCATTERING
SCATTERING AMPLITUDES
SIMULATION
TIME RESOLUTION
TIMING PROPERTIES
VIBRATIONAL STATES
WEAKLY IONIZED GASES