Time-dependent solution of Boltzmann equation in rf plasmas: a comparison with the effective field approximation

Journal Article · Sun Mar 01 04:00:00 EST 1987 · Plasma Chem. Plasma Process.; (United States)

DOI:https://doi.org/10.1007/BF01016003· OSTI ID:6322658

Winkler, R; Dilonardo, M; Capitelli, M; Wilhelm, J

Electron isotropic distribution function (idf) and related quantities in rf plasmas (CO, H/sub 2/, Ne), calculated by solving the time-dependent Boltzmann equation, are compared with the corresponding values obtained by using the effective field approximation (efa). They show that the agreement between the two methods depends on the ratio between the applied field frequency and the lumped frequencies for impulse and energy dissipation. In fact, only at moderately high field frequencies are results obtained according to efa comparable with the corresponding ones obtained by the time-dependent solution and subsequent time averaging, while in the other cases differences up to two orders of magnitude are observed.

• Research Organization: Zentralinstitut fuer Elektronenphysik, Griefswald, East Germany
• OSTI ID: 6322658
• Journal Information: Plasma Chem. Plasma Process.; (United States), Journal Name: Plasma Chem. Plasma Process.; (United States) Vol. 7:1; ISSN PCPPD
• Country of Publication: United States
• Language: English

Related Subjects

640302* -- Atomic
Molecular & Chemical Physics-- Atomic & Molecular Properties & Theory
74 ATOMIC AND MOLECULAR PHYSICS
ATOMIC IONS
BOLTZMANN EQUATION
CARBON COMPOUNDS
CARBON MONOXIDE
CARBON OXIDES
CHALCOGENIDES
CHARGED PARTICLES
COLLISIONS
DIFFERENTIAL EQUATIONS
DISTRIBUTION FUNCTIONS
ELECTRIC FIELDS
ELECTRON COLLISIONS
ELECTRON MOBILITY
ELECTRONS
ELEMENTARY PARTICLES
ELEMENTS
ENERGY SPECTRA
ENERGY TRANSFER
EQUATIONS
FERMIONS
FLUIDS
FREQUENCY DEPENDENCE
FUNCTIONS
GASES
HYDROGEN
INELASTIC SCATTERING
IONIZATION
IONS
LEPTONS
MOBILITY
MOLECULAR IONS
NEON
NONMETALS
OXIDES
OXYGEN COMPOUNDS
PARTIAL DIFFERENTIAL EQUATIONS
PARTICLE MOBILITY
PLASMA
PLASMA SIMULATION
RARE GASES
SCATTERING
SIMULATION
SPECTRA
TIME DEPENDENCE
TRANSPORT THEORY