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Substrate heating and emitter dopant effects in laser-annealed solar cells

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.92704· OSTI ID:6407842
This letter provides the first experimental evidence that substrate heating during pulsed-laser annealing (PLA) of ion-implanted silicon can significantly improve the electrical properties of the laser recrystalized region due to the reduction of the regrowth velocity. It is also shown that by using the optimum PLA condition, the open-circuit voltage V/sub OC/ and the fill factor of ion-implanted, laser-annealed solar cells are improved by increasing the emitter dopant concentrations, whereas the short-circuit current J/sub SC/ remains fairly constant, results which are in qualitative agreement with theoretical predictions.
Research Organization:
Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830
DOE Contract Number:
W-7405-ENG-26
OSTI ID:
6407842
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 39:4; ISSN APPLA
Country of Publication:
United States
Language:
English