A manufacturing method for multi-layer polysilicon surface-micromachining technology
Conference
·
OSTI ID:634062
An advanced manufacturing technology which provides multi-layered polysilicon surface micromachining technology for advanced weapon systems is presented. Specifically, the addition of another design layer to a 4 levels process to create a 5 levels process allows consideration of fundamentally new architecture in designs for weapon advanced surety components.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 634062
- Report Number(s):
- SAND--98-0067C; CONF-980328--; ON: DE98002723; BR: DP0102021
- Country of Publication:
- United States
- Language:
- English
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