Micromachining technology for advanced weapon systems
Conference
·
OSTI ID:454020
An overview of planned uses for polysilicon surface-micromachining technology in advanced weapon systems is presented. Specifically, this technology may allow consideration of fundamentally new architectures for realization of surety component functions.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 454020
- Report Number(s):
- SAND--96-1934C; CONF-970329--4; ON: DE97001878
- Country of Publication:
- United States
- Language:
- English
Similar Records
A manufacturing method for multi-layer polysilicon surface-micromachining technology
Macrodesign for microdevices: Polysilicon surface-micromachining technology, applications and issues
Micromachined systems-on-a-chip: Technology and applications
Conference
·
Wed Dec 31 23:00:00 EST 1997
·
OSTI ID:634062
Macrodesign for microdevices: Polysilicon surface-micromachining technology, applications and issues
Conference
·
Thu May 01 00:00:00 EDT 1997
·
OSTI ID:474937
Micromachined systems-on-a-chip: Technology and applications
Conference
·
Mon Mar 31 23:00:00 EST 1997
·
OSTI ID:468576