Low Z[sub 1]/low Z[sub 2] multilayer x-ray optical thin films
The authors have deposited, via magnetron sputter deposition, multilayer structures comprised of alternating layers of low atomic number materials such as: (1) carbon and boron carbide, (2) silicon and boron carbide, (3) silicon and carbon and (4) aluminum and boron carbide. Layer periods for these materials combinations range from 63.5 to 75[angstrom]. These low atomic number multilayers exhibit significant first order Bragg diffraction of Cu k-alpha radiation. Calculations of the reflectivity performance for multilayers of this composition have been made using a computer code based on the Modified Darwin-Prinz theory. Experimental measurements and code predictions are in close agreement. Multilayers of this type may find application in devices requiring ultra-low dispersion focusing x-ray optics, such as long focal length focussed beam lines, x-ray microscopes and x-ray telescopes. Diagnostics for plasma characterization in fusion experiments that are free from Ledge absorption, high transmittance/high resolution beam splitting x-ray optics, and output couplers soft x-ray laser cavities are other possible applications for low-Z[sub 1]/low-Z[sub 2] multilayers.
- Research Organization:
- Lawrence Livermore National Lab., CA (United States)
- Sponsoring Organization:
- USDOE; USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 6340530
- Report Number(s):
- UCRL-JC-107573; CONF-9107115-82; ON: DE93017151
- Resource Relation:
- Conference: Society of Photo-Optical Instrumentation Engineers (SPIE) meeting, San Diego, CA (United States), 21-26 Jul 1991
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
BORON CARBIDES
DEPOSITION
OPTICAL PROPERTIES
CARBON
SILICON
BRAGG REFLECTION
COMPARATIVE EVALUATIONS
COMPUTERIZED SIMULATION
EXPERIMENTAL DATA
NUMERICAL SOLUTION
REFLECTIVE COATINGS
REFLECTIVITY
THIN FILMS
VAPOR DEPOSITED COATINGS
BORON COMPOUNDS
CARBIDES
CARBON COMPOUNDS
COATINGS
DATA
ELEMENTS
EVALUATION
FILMS
INFORMATION
NONMETALS
NUMERICAL DATA
PHYSICAL PROPERTIES
REFLECTION
SEMIMETALS
SIMULATION
SURFACE PROPERTIES
440600* - Optical Instrumentation- (1990-)
360606 - Other Materials- Physical Properties- (1992-)