Pulsed excimer laser deposition Y sub 1 Ba sub 2 Cu sub 3 O sub 7 minus x superconductor films on silicon with laser-deposited Y-ZrO sub 2 buffer layer

Journal Article · Mon Oct 22 04:00:00 EDT 1990 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.104142· OSTI ID:6335524

Ogale, S B; Vispute, R D; Rao, R R ^[1]

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1. Centre for Advanced Studies in Materials Science and Solid State Physics, Department of Physics, University of Poona, Pune (India)

The pulsed excimer laser ablation method is used to deposit both the buffer layer of Y-stabilized ZrO{sub 2} and the overlayer of Y{sub 1}Ba{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} superconductor on (100) oriented single-crystal silicon. Process parameter optimization study is carried out and it is shown that a thin film of the superconductor (0.5--0.7 {mu}m) having a zero resistance temperature of 86 K can be obtained using a 0.3 {mu}m buffer layer deposited at substrate temperatures between 600 and 800 {degree}C.

• OSTI ID: 6335524
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 57:17; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
ABLATION
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
EPITAXY
FILMS
HIGH-TC SUPERCONDUCTORS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SUBSTRATES
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VAPOR PHASE EPITAXY
YTTRIUM COMPOUNDS
YTTRIUM OXIDES