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Variation in composition of solid solutions of Al/sub x/Ga/sub 1-x/As during multiple zone recrystallization

Journal Article · · Inorg. Mater. (Engl. Transl.); (United States)
OSTI ID:6291970
Theoretical analysis of the redistribution of the components in Al/sub x/Ga/sub 1-x/As in solid solutions has shown that during multiple zone recrystallization with a temperature gradient, it is possible to affect in a targeted fashion the parameters of the concentration profiles of epitaxial layers by choice of the initial aluminum concentration, the process temperature, the thickness of the liquid zone, and regulation of its displacement in specific directions. The experimental investigations have mainly confirmed the theoretical calculations. The discrepancy between the calculated concentration profiles for layers of Al/sub X/Ga/sub 1-x/As and the experimental data increases as the number of passes of the zone increases, but is not more than 15%.
OSTI ID:
6291970
Journal Information:
Inorg. Mater. (Engl. Transl.); (United States), Journal Name: Inorg. Mater. (Engl. Transl.); (United States) Vol. 24:2; ISSN INOMA
Country of Publication:
United States
Language:
English