A high-power long pulse excimer laser
Journal Article
·
· IEEE Photonics Technol. Lett.; (United States)
Excimer lasers operating at high-average powers are becoming important for materials processing applications, A long pulse excimer laser with automatic spark preionization which provides a pulse energy of 1 J with an optical pulse length of 200 ns FWHM for XeCl is described. Successful scaling of the repetition rate to 220 pps is discussed along with requirements for gas flow.
- Research Organization:
- Lumonics, Inc., Kanata, Ontario (CA)
- OSTI ID:
- 6252633
- Journal Information:
- IEEE Photonics Technol. Lett.; (United States), Journal Name: IEEE Photonics Technol. Lett.; (United States) Vol. 1:3; ISSN IPTLE
- Country of Publication:
- United States
- Language:
- English
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