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Design and characteristics of high pulse repetition rate and high average power excimer laser systems

Journal Article · · IEEE Journal of Quantum Electronics (Institute of Electrical and Electronics Engineers); (United States)
DOI:https://doi.org/10.1109/3.97278· OSTI ID:5869159
; ; ;  [1]
  1. Inst. de Mecanique des Fluides de Marseille, UM 34 CRNS, Univ. d'Aix-Marseille, 13003 Marseille (FR)
This paper describes the design and the performance characteristics of an X-ray preionized discharge pumped XeCl laser system operated at very high repetition rate frequency and high average power (200 W). The laser system is mainly composed of a fast flow subsonic closed cycle wind tunnel, a laser head, a high average power electrical excitation system, and an X-ray preionization source. The laser head design and the dumping of acoustic waves induced by fast electrical energy deposition of 50 J/L bar allow this device to be operated at repetition rate frequencies of up to {approx}1700 Hz.
OSTI ID:
5869159
Journal Information:
IEEE Journal of Quantum Electronics (Institute of Electrical and Electronics Engineers); (United States), Journal Name: IEEE Journal of Quantum Electronics (Institute of Electrical and Electronics Engineers); (United States) Vol. 27:10; ISSN 0018-9197; ISSN IEJQA
Country of Publication:
United States
Language:
English

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