Quantitation of Auger and X-ray photoelectron spectroscopies
Surface analysis using electron spectroscopies is now a well-established and continuously expanding area. With appropriate data treatment procedures, both Auger electron spectroscopy (AES, not to be confused with atomic expression spectroscopy) and X-ray photoelectron spectroscopy (XPS or ESCA) can routinely supply reliable qualitative and semiquantitative characterization of the near-surface region (top 1-100 /Angstrom/) of most solids. Complex sample matrix and instrumental parameters make quantitation of surface electron spectroscopies a real challenge. Kenneth W. Nebesny, Brian L. Mashloff, and Neal R. Armstrong of the University of Arizona describe approaches that make it possible to obtain reliable compositional information.
- Research Organization:
- Univ. of Arizona, Tucson (USA)
- OSTI ID:
- 6224176
- Journal Information:
- Anal. Chem.; (United States), Vol. 61:7
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
AUGER ELECTRON SPECTROSCOPY
TECHNOLOGY ASSESSMENT
PHOTOELECTRON SPECTROSCOPY
CHEMICAL COMPOSITION
QUANTITATIVE CHEMICAL ANALYSIS
SURFACES
X RADIATION
CHEMICAL ANALYSIS
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
IONIZING RADIATIONS
RADIATIONS
SPECTROSCOPY
400102* - Chemical & Spectral Procedures