Quantitation of Auger and X-ray photoelectron spectroscopies

Journal Article · Fri Mar 31 23:00:00 EST 1989 · Anal. Chem.; (United States)

DOI:https://doi.org/10.1021/ac00182a731· OSTI ID:6224176

Nebesny, K W; Maschhoff, B L; Armstrong, N R

Surface analysis using electron spectroscopies is now a well-established and continuously expanding area. With appropriate data treatment procedures, both Auger electron spectroscopy (AES, not to be confused with atomic expression spectroscopy) and X-ray photoelectron spectroscopy (XPS or ESCA) can routinely supply reliable qualitative and semiquantitative characterization of the near-surface region (top 1-100 /Angstrom/) of most solids. Complex sample matrix and instrumental parameters make quantitation of surface electron spectroscopies a real challenge. Kenneth W. Nebesny, Brian L. Mashloff, and Neal R. Armstrong of the University of Arizona describe approaches that make it possible to obtain reliable compositional information.

• Research Organization: Univ. of Arizona, Tucson (USA)
• OSTI ID: 6224176
• Journal Information: Anal. Chem.; (United States), Journal Name: Anal. Chem.; (United States) Vol. 61:7; ISSN ANCHA
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400102* -- Chemical & Spectral Procedures
AUGER ELECTRON SPECTROSCOPY
CHEMICAL ANALYSIS
CHEMICAL COMPOSITION
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
IONIZING RADIATIONS
PHOTOELECTRON SPECTROSCOPY
QUANTITATIVE CHEMICAL ANALYSIS
RADIATIONS
SPECTROSCOPY
SURFACES
TECHNOLOGY ASSESSMENT
X RADIATION