Secondary fluorescence effects on x-ray microanalysis
Secondary fluorescence by backscattered electrons and x rays produced by the interaction of the electron probe with the specimen has been shown to lead to significant errors in energy dispersive x-ray spectroscopy (EDS) performed in an analytical electron microscope (AEM). Although such fluorescence effects have been discussed by many authors, there has never been a clear demonstration of the importance of accounting for secondary fluorescence in quantitative x-ray microanalysis. The present experiments were performed to assess quantitatively the suspected influence of secondary fluorescence effects on EDS analyses of intergranular phase in TiB/sub 2/-Ni ceramics. Experiments demonstrated that secondary fluorescence can produce errors of up to 10% in compositions determined by x-ray microanalysis in an AEM. Secondary fluorescence effects increase as the specimen in tilted to greater angles. Preliminary analyses of P/B ratios indicate that backscattered electrons are more likely responsible for secondary fluorescence than high energy x rays. 6 references, 3 figures, 2 tables.
- Research Organization:
- Oak Ridge National Lab., TN (USA)
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 6222483
- Report Number(s):
- CONF-840767-15; ON: DE85005565
- Country of Publication:
- United States
- Language:
- English
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47 OTHER INSTRUMENTATION
ALLOYS
BACKSCATTERING
BORIDES
BORON COMPOUNDS
CERAMICS
CHEMICAL ANALYSIS
DATA
ELECTROMAGNETIC RADIATION
ELECTRON MICROPROBE ANALYSIS
ELECTRON MICROSCOPY
ELECTRONS
ELEMENTARY PARTICLES
ERRORS
EXPERIMENTAL DATA
FABRICATION
FERMIONS
FLUORESCENCE
HOT PRESSING
INFORMATION
IONIZING RADIATIONS
LEPTONS
LUMINESCENCE
MATERIALS WORKING
MICROANALYSIS
MICROSCOPY
NICKEL ADDITIONS
NICKEL ALLOYS
NICKEL BORIDES
NICKEL COMPOUNDS
NUMERICAL DATA
PRESSING
RADIATIONS
SCATTERING
SPECTRA
TITANIUM BORIDES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
X RADIATION
X-RAY SPECTRA