Comparisons of UT-MARLOWE predictions of implant-induced damage with experimentally measured amorphous layer thicknesses
Conference
·
OSTI ID:621277
- Univ. of Texas, Austin, TX (United States); and others
Amorphous layer thicknesses have been obtained for As, BF{sub 2} and B ion implants using the following experimental techniques: RBS, differential reflectometry, SEM and XTEM. Good agreement is generally found between the amorphous layer thickness measurements. Amorphous layer thickness predictions are presented based on the current version (3.1) of UT-MARLOWE with the simplified physically based damage model. The predictions for the amorphous layer thicknesses are in good agreement with the experimental data for As and BF{sub 2}, but are larger than the measured amorphous layer thicknesses for B implants. The difference in the predictive ability for as and BF{sub 2} relative to B is explained in terms of the distributions of damage produced during implantation. The measurement results, predictions, and the differences found are discussed in this paper.
- OSTI ID:
- 621277
- Report Number(s):
- CONF-9606110--
- Country of Publication:
- United States
- Language:
- English
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