dc magnetron- and diode-sputtered polycrystalline Fe and amorphous Tb(FeCo) films: Morphology and magnetic properties

Journal Article · Wed Jan 15 04:00:00 EST 1986 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.336667· OSTI ID:6199162

Hong, M; Gyorgy, E M; van Dover, R B; Nakahara, S; Bacon, D D; Gallagher, P K

We have prepared polycrystalline Fe and amorphous Tb(FeCo) films using both dc diode- and magnetron-sputtering techniques. Magnetic properties and aging characteristics of these films were measured by a vibrating sample magnetometer and an automatic torque magnetometer. Film morphologies were studied by transmission electron microscopy. The magnetic and aging characteristics are closely correlated to the film morphology. It was also found that different sputtering methods can be tailored to produce a similar film morphology. Among the sputtering parameters, the Ar pressure during deposition at room or lower temperature strongly influences the film morphology.

• Research Organization: AT and T Bell Laboratories, Murray Hill, New Jersey 07974
• OSTI ID: 6199162
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 59:2; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360104* -- Metals & Alloys-- Physical Properties
AGING
ALLOYS
ARGON
CHEMICAL REACTIONS
COBALT ALLOYS
CORROSION RESISTANCE
CRYSTAL STRUCTURE
ELECTRON MICROSCOPY
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FILMS
FLUIDS
GASES
GRAIN SIZE
IRON
IRON ALLOYS
MAGNETIC PROPERTIES
MAGNETOMETERS
MAGNETRONS
MEASURING INSTRUMENTS
METALLIC GLASSES
METALS
MICROSCOPY
MICROSTRUCTURE
MICROWAVE EQUIPMENT
MICROWAVE TUBES
MORPHOLOGY
NONMETALS
OXIDATION
PHYSICAL PROPERTIES
RARE EARTH ALLOYS
RARE GASES
SIZE
SPUTTERING
TERBIUM ALLOYS
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY