Microstructures of thin sputtered amorphous Tb/sub 0. 26/Fe/sub 0. 74/ and polycrystalline Fe films
Journal Article
·
· J. Vac. Sci. Technol., A; (United States)
A transmission electron microscope was used to characterize the microstructure of Te/sub 0.26/Fe/sub 0.74/ and Fe films obtained by magnetron and dc diode sputtering techniques. The films obtained by magnetron sputtering were very smooth, whereas those by diode sputtering were not smooth but islandlike, similar to the columnar structure. The microstructures were further examined by varying the pressure of argon gas. In both sputtering systems, an increase in the pressure promotes a tendency of the columnar structure to form.
- Research Organization:
- AT and T Bell Laboratories, Murray Hill, New Jersey 07974
- OSTI ID:
- 5542674
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 4:3; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360102* -- Metals & Alloys-- Structure & Phase Studies
ALLOYS
AMORPHOUS STATE
ARGON
CRYSTAL STRUCTURE
ELECTRON MICROSCOPY
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FLUIDS
GASES
IRON
IRON ALLOYS
IRON BASE ALLOYS
MAGNETRONS
METALLIC GLASSES
METALS
MICROSCOPY
MICROSTRUCTURE
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NONMETALS
PHYSICAL PROPERTIES
RARE EARTH ALLOYS
RARE GASES
ROUGHNESS
SPUTTERING
SURFACE PROPERTIES
TERBIUM ALLOYS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY
VAPOR PRESSURE
360102* -- Metals & Alloys-- Structure & Phase Studies
ALLOYS
AMORPHOUS STATE
ARGON
CRYSTAL STRUCTURE
ELECTRON MICROSCOPY
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FLUIDS
GASES
IRON
IRON ALLOYS
IRON BASE ALLOYS
MAGNETRONS
METALLIC GLASSES
METALS
MICROSCOPY
MICROSTRUCTURE
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NONMETALS
PHYSICAL PROPERTIES
RARE EARTH ALLOYS
RARE GASES
ROUGHNESS
SPUTTERING
SURFACE PROPERTIES
TERBIUM ALLOYS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENTS
TRANSMISSION ELECTRON MICROSCOPY
VAPOR PRESSURE