Epitaxial thin films of YBa sub 2 Cu sub 3 O sub 7 minus x on LaAlO sub 3 substrates deposited by plasma-enhanced metalorganic chemical vapor deposition

Journal Article · Mon Jan 14 04:00:00 EST 1991 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.104973· OSTI ID:6195183

Chern, C S; Zhao, J; Li, Y Q; Norris, P; Kear, B; Gallois, B; Kalman, Z ^[1]

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1. EMCORE Corporation, 35 Elizabeth Avenue, Somerset, New Jersey 08873 (US)

High quality epitaxial YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} (YBCO) superconducting thin films (0.3 {mu}m thick) were grown on the closely lattice and thermal expansion matched substrate, LaAlO{sub 3}, which has low dielectric loss. The YBCO layers were prepared, {ital in} {ital situ}, by a microwave plasma-enhanced metalorganic chemical vapor deposition process. The films, which had mirror-like smooth surfaces, were deposited at a substrate temperature of 730 {degree}C with a partial pressure of 2 Torr of N{sub 2}O. The electrical resistance and magnetic susceptibility versus temperature of the as-deposited films show metallic behavior in the normal state and sharp superconducting transitions with {ital T}{sub {ital c}} ({ital R}=0) of 88 K. Critical current densities measured on patterned bridges were 5{times}10{sup 5} A/cm{sup 2} at 78 K for the films deposited on LaAlO{sub 3}. X-ray diffraction measurements indicate that films grow epitaxially in the plane of the substrate with axis perpendicular to the substrate surface.

• OSTI ID: 6195183
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 58:2; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DIFFRACTION
FILMS
HIGH-TC SUPERCONDUCTORS
ORGANIC COMPOUNDS
ORGANOMETALLIC COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PLASMA
SCATTERING
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
X-RAY DIFFRACTION
YTTRIUM COMPOUNDS
YTTRIUM OXIDES