Compositional effects on plasma-enhanced metalorganic chemical vapor deposition of YBa sub 2 Cu sub 3 O sub 7 minus x thin films

Journal Article · Mon Jun 17 04:00:00 EDT 1991 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.104752· OSTI ID:5810718

Zhao, J; Chern, C S; Li, Y Q; Norris, P; Gallois, B; Kear, B; Wu, X D; Muenchausen, R E ^[1]

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1. EMCORE Corporation, 35 Elizabeth Avenue, Somerset, New Jersey 08873 (US)

Epitaxial YBa{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} superconducting thin films with a zero resistance transition temperatures of about 90 K have been prepared, {ital in} {ital situ}, on LaAlO{sub 3} by a plasma-enhanced metalorganic chemical vapor deposition process at a substrate temperature of 670 {degree}C in 1 Torr partial pressure of N{sub 2}O. The composition of the films was varied systematically to investigate the effect of changes in the Ba/Y and Cu/Y ratio on the film properties. The results indicated that superconducting current densities exceeding 10{sup 6} A/cm{sup 2}, measured at 77 K by a transport method, could be obtained on films with an anomalously wide range of film compositions. Excess Cu (up to 60%) and deficiency in Ba (down to 30%) from their stoichiometric values did not significantly degrade the superconducting properties of the films. As the composition approached the Y-Ba-Cu ratio of 1-2-3, an improvement in surface morphology and a decrease in superconducting transition temperature were found.

• OSTI ID: 5810718
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 58:24; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202 -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
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Cermets
& Refractories-- Physical Properties
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BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COPPER COMPOUNDS
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PHYSICAL PROPERTIES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SUPERCONDUCTORS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
US AEC
US DOE
US ERDA
US ORGANIZATIONS
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YTTRIUM OXIDES