Angular distribution of sputtered atoms from polycrystalline metal targets

Journal Article · Wed Jul 01 04:00:00 EDT 1981 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.329365· OSTI ID:6183489

Tsuge, H; Esho, S

Angular distribution of sputtered atoms from polycrystalline metal targets with crystallographic-preferred orientation was measured for 0.5- and 1.0-keV Ar/sup +/ ions at incidence angles of 0/sup 0/ and 45/sup 0/. The distribution was compared with that for a Si (100) single-crystal target. Atoms sputtered from Au, Pt, Al, and NiFe targets are ejected preferentially in the directions of their close packing in the lattice. For the Si target, the distribution is under cosine. These results are explained in terms of the target-surface crystal structure during and after ion bombardment. The surface structure for the metal targets remains essentially unchanged, but not for the Si target. Sputtered-atom ejection along the target normally increases with increasing incident-ion energy. Even at oblique incidence, heavy-target atoms such as Au, appear to have preferentially ejected atoms in the close-packed directions.

• Research Organization: Basic Technology Research Laboratories, Nippon Electric Co., Ltd,. Takatsu-ku, Kawasaki, 213 Japan
• OSTI ID: 6183489
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 52:7; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALUMINIUM
ANGULAR DISTRIBUTION
ARGON IONS
ATOMS
CHARGED PARTICLES
COLLISIONS
COMPARATIVE EVALUATIONS
CRYSTAL LATTICES
CRYSTAL STRUCTURE
CRYSTALS
DISTRIBUTION
ELEMENTS
ENERGY RANGE
GOLD
INCIDENCE ANGLE
IONS
KEV RANGE
MATHEMATICAL MODELS
METALS
MONOCRYSTALS
ORIENTATION
PLATINUM
PLATINUM METALS
POLYCRYSTALS
SEMIMETALS
SILICON
SPUTTERING
TARGETS
TRANSITION ELEMENTS