Angular distribution of particles sputtered from metals and alloys

Journal Article · Fri Jul 01 00:00:00 EDT 1988 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.575582· OSTI ID:7231872

Wucher, A; Reuter, W

The angular distributions of atoms sputtered from pure Cu and Be as well as Cu/sub 98/Be/sub 2/, Cu/sub 71/Zn/sub 29/, Co/sub 3/Au, and WSi/sub 2.3/ were investigated for bombardment with Ar/sup +/ ions of 250 eV and 2 keV under normal incidence. Between polar emission angles theta = 0/sup 0/ and 60/sup 0/, for the higher bombarding energy all observed angular distributions look very much alike and follow essentially a cos/sup 3/ theta law. For the low bombarding energy, however, significant differences between the angular distributions of the alloy constituents are found. The effect, which is most pronounced for CuBe, seems to scale with the atomic mass in the way that the lower mass particles are sputtered preferentially along the surface normal.

• Research Organization: IBM T. J. Watson Research Center, Yorktown Heights, New York 10598
• OSTI ID: 7231872
• Journal Information: J. Vac. Sci. Technol., A; (United States), Vol. 6:4
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON IONS
COLLISIONS
BERYLLIUM
ION COLLISIONS
SPUTTERING
BERYLLIUM ALLOYS
COBALT BASE ALLOYS
COPPER
COPPER BASE ALLOYS
GOLD ALLOYS
SILICON ALLOYS
TUNGSTEN ALLOYS
ZINC ALLOYS
ANGULAR DISTRIBUTION
EV RANGE 100-1000
KEV RANGE 01-10
ALKALINE EARTH METALS
ALLOYS
CHARGED PARTICLES
COBALT ALLOYS
COPPER ALLOYS
DISTRIBUTION
ELEMENTS
ENERGY RANGE
EV RANGE
IONS
KEV RANGE
METALS
TRANSITION ELEMENTS
656003* - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)