Angular distribution of particles sputtered from metals and alloys
Journal Article
·
· J. Vac. Sci. Technol., A; (United States)
The angular distributions of atoms sputtered from pure Cu and Be as well as Cu/sub 98/Be/sub 2/, Cu/sub 71/Zn/sub 29/, Co/sub 3/Au, and WSi/sub 2.3/ were investigated for bombardment with Ar/sup +/ ions of 250 eV and 2 keV under normal incidence. Between polar emission angles theta = 0/sup 0/ and 60/sup 0/, for the higher bombarding energy all observed angular distributions look very much alike and follow essentially a cos/sup 3/ theta law. For the low bombarding energy, however, significant differences between the angular distributions of the alloy constituents are found. The effect, which is most pronounced for CuBe, seems to scale with the atomic mass in the way that the lower mass particles are sputtered preferentially along the surface normal.
- Research Organization:
- IBM T. J. Watson Research Center, Yorktown Heights, New York 10598
- OSTI ID:
- 7231872
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 6:4; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METALS
ALLOYS
ANGULAR DISTRIBUTION
ARGON IONS
BERYLLIUM
BERYLLIUM ALLOYS
CHARGED PARTICLES
COBALT ALLOYS
COBALT BASE ALLOYS
COLLISIONS
COPPER
COPPER ALLOYS
COPPER BASE ALLOYS
DISTRIBUTION
ELEMENTS
ENERGY RANGE
EV RANGE
EV RANGE 100-1000
GOLD ALLOYS
ION COLLISIONS
IONS
KEV RANGE
KEV RANGE 01-10
METALS
SILICON ALLOYS
SPUTTERING
TRANSITION ELEMENTS
TUNGSTEN ALLOYS
ZINC ALLOYS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METALS
ALLOYS
ANGULAR DISTRIBUTION
ARGON IONS
BERYLLIUM
BERYLLIUM ALLOYS
CHARGED PARTICLES
COBALT ALLOYS
COBALT BASE ALLOYS
COLLISIONS
COPPER
COPPER ALLOYS
COPPER BASE ALLOYS
DISTRIBUTION
ELEMENTS
ENERGY RANGE
EV RANGE
EV RANGE 100-1000
GOLD ALLOYS
ION COLLISIONS
IONS
KEV RANGE
KEV RANGE 01-10
METALS
SILICON ALLOYS
SPUTTERING
TRANSITION ELEMENTS
TUNGSTEN ALLOYS
ZINC ALLOYS