Characterization of diamond thin films: Diamond phase identification, surface morphology, and defect structures

Journal Article · Wed Mar 01 04:00:00 EST 1989 · J. Mat. Res.; (United States)

DOI:https://doi.org/10.1557/JMR.1989.0373· OSTI ID:6182190

Williams, B E; Glass, J T

Thin carbon films grown from a low pressure methane-hydrogen gas mixture by microwave plasma enhanced CVD have been examined by Auger electron spectroscopy, secondary ion mass spectrometry, electron and x-ray diffraction, electron energy loss spectroscopy, and electron microscopy. They were determined to be similar to natural diamond in terms of composition, structure, and bonding. The surface morphology of the diamond films was a function of position on the sample surface and the methane concentration in the feedgas. Well-faceted diamond crystals were observed near the center of the sample whereas a less faceted, cauliflower texture was observed near the edge of the sample, presumably due to variations in temperature across the surface of the sample. Regarding methane concentration effects, threefold /111/ faceted diamond crystals were predominant on a film grown at 0.3% CH/sub 4/ in H/sub 2/ while fourfold /100/ facets were observed on films grown in 1.0% and 2.0% CH/sub 4/ in H/sub 2/. Transmission electron microscopy of the diamond films has shown that the majority of diamond crystals have a very high defect density comprised of /111/ twins, /111/ stacking faults, and dislocations. In addition, cross-sectional TEM has revealed a 50 A epitaxial layer of ..beta..--SiC at the diamond-silicon interface of a film grown with 0.3% CH/sub 4/ in H/sub 2/ while no such layer was observed on a diamond film grown in 2.0% CH/sub 4/ in H/sub 2/.

• Research Organization: Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695-7907
• OSTI ID: 6182190
• Journal Information: J. Mat. Res.; (United States), Journal Name: J. Mat. Res.; (United States) Vol. 4:2; ISSN JMREE
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
360602* -- Other Materials-- Structure & Phase Studies
ALKANES
AUGER ELECTRON SPECTROSCOPY
CARBON
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
DEPOSITION
DIAMONDS
DIFFRACTION
DISPERSIONS
ELECTROMAGNETIC RADIATION
ELECTRON DIFFRACTION
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELEMENTAL MINERALS
ELEMENTS
EMISSION
ENERGY LOSSES
FILMS
HYDROCARBONS
HYDROGEN
ION EMISSION
LOSSES
MASS SPECTRA
METHANE
MICROSCOPY
MICROWAVE RADIATION
MINERALS
MIXTURES
MORPHOLOGY
NONMETALS
ORGANIC COMPOUNDS
PHASE STUDIES
PLASMA
RADIATIONS
SCATTERING
SECONDARY EMISSION
SPECTRA
SPECTROSCOPY
SURFACE COATING
THIN FILMS
X-RAY DIFFRACTION