Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition

Gou, Huiyang; Hemley, Russell J.; Hemawan, Kadek W.

doi:10.1063/1.4934751

Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition

Journal Article · Mon Nov 02 00:00:00 EST 2015 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4934751· OSTI ID:1335449

^[1]; Hemley, Russell J. ^[2]; ^[2]

Carnegie Inst. of Washington, Washington, D.C. (United States); Carnegie Institution of Washington
Carnegie Inst. of Washington, Washington, D.C. (United States)

Polycrystalline diamond has been successfully synthesized on silicon substrates at atmospheric pressure using a microwave capillary plasma chemical vapor deposition technique. The CH₄/Ar plasma was generated inside of quartz capillary tubes using 2.45 GHz microwave excitation without adding H2 into the deposition gas chemistry. Electronically excited species of CN, C₂, Ar, N₂, CH, H_β and H_α were observed in emission spectra. Raman measurements of deposited material indicate the formation of well-crystallized diamond, as evidenced by the sharp T_2g phonon at 1333 cm^-1 peak relative to the Raman features of graphitic carbon. Furthermore, field emission scanning electron microscopy (SEM) images reveal that, depending on the on growth conditions, the carbon microstructures of grown films exhibit “coral” and “cauliflower-like” morphologies or well-facetted diamond crystals with grain sizes ranging from 100 nm to 10 μm.

View Accepted Manuscript (DOE)

Research Organization:: Carnegie Inst. of Washington, Washington, D.C. (United States); Energy Frontier Research Centers (EFRC) (United States). Energy Frontier Research in Extreme Environments (EFree)

Sponsoring Organization:: USDOE; USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: NA0002006; SC0001057

OSTI ID:: 1335449

Alternate ID(s):: OSTI ID: 1224932
OSTI ID: 22485988

Journal Information:: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 18 Vol. 107; ISSN 0003-6951; ISSN APPLAB

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

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36 MATERIALS SCIENCE
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