Diamond synthesis at atmospheric pressure by microwave capillary plasma chemical vapor deposition

Journal Article · Mon Nov 02 04:00:00 EST 2015 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4934751· OSTI ID:22485988

Hemawan, Kadek W.; Gou, Huiyang; Hemley, Russell J. ^[1]

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1. Geophysical Laboratory, Carnegie Institution of Washington, 5251 Broad Branch Rd., NW, Washington, DC 20015 (United States)

Polycrystalline diamond has been synthesized on silicon substrates at atmospheric pressure, using a microwave capillary plasma chemical vapor deposition technique. The CH{sub 4}/Ar plasma was generated inside of quartz capillary tubes using 2.45 GHz microwave excitation without adding H{sub 2} into the deposition gas chemistry. Electronically excited species of CN, C{sub 2}, Ar, N{sub 2}, CH, H{sub β}, and H{sub α} were observed in the emission spectra. Raman measurements of deposited material indicate the formation of well-crystallized diamond, as evidenced by the sharp T{sub 2g} phonon at 1333 cm{sup −1} peak relative to the Raman features of graphitic carbon. Field emission scanning electron microscopy images reveal that, depending on the growth conditions, the carbon microstructures of grown films exhibit “coral” and “cauliflower-like” morphologies or well-facetted diamond crystals with grain sizes ranging from 100 nm to 10 μm.

• OSTI ID: 22485988
• Journal Information: Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 18 Vol. 107; ISSN APPLAB; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ATMOSPHERIC PRESSURE
CARBON NITRIDES
CHEMICAL VAPOR DEPOSITION
DEPOSITS
DIAMONDS
EMISSION SPECTRA
FIELD EMISSION
GHZ RANGE
GRAIN SIZE
GRAPHITE
HYDROGEN
MICROWAVE RADIATION
MORPHOLOGY
PHONONS
PLASMA
QUARTZ
SCANNING ELECTRON MICROSCOPY
SUBSTRATES