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Study of the deposition of polymeric material onto surfaces from fluorocarbon RF plasmas

Journal Article · · Plasma Chem. Plasma Process.; (United States)
DOI:https://doi.org/10.1007/BF00565553· OSTI ID:6161377
; ; ;
A series of fluorocarbon gases, viz., CF/sub 4/, C/sub 2/F/sub 6/, C/sub 3/F/sub 8/, and CHF/sub 3/, have been compared for their relative tendencies to deposit polymeric material onto various surfaces, including Si and SiO/sub 2/, under RF plasma conditions. The plasmas were examined by optical emission spectroscopy. C/sub 3/F/sub 8/ and CHF/sub 3/ were found to produce the highest yields of polymers, although these exhibited significant differences in structure (as shown by XPS and IR) and differences in thermal stability, both of which could be minimized by replacing the C/sub 3/F/sub 8/ gas with a C/sub 3/F/sub 8//H/sub 2/ mixture. The polymers produced from CHF/sub 3/ under the conditions of the present study were found to accumulate preferentially onto Si rather than SiO/sub 2/, as verified by the technique of Rutherford backscattering spectrometry.
Research Organization:
Plasma Technology (UK) Ltd., Bristol, England
OSTI ID:
6161377
Journal Information:
Plasma Chem. Plasma Process.; (United States), Journal Name: Plasma Chem. Plasma Process.; (United States) Vol. 6:4; ISSN PCPPD
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
360601* -- Other Materials-- Preparation & Manufacture
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
BACKSCATTERING
BEAMS
CHALCOGENIDES
CHARGED PARTICLES
CHEMICAL REACTION YIELD
CHEMICAL REACTIONS
COATINGS
COLLISIONS
COMPARATIVE EVALUATIONS
CROSS-LINKING
DEPOSITION
ELASTIC SCATTERING
ELECTRODES
ELEMENTS
EMISSION SPECTRA
ETCHING
FLUORINATED ALIPHATIC HYDROCARBONS
HALOGENATED ALIPHATIC HYDROCARBONS
HELIUM IONS
HYDROGEN
INFRARED SPECTRA
ION BEAMS
ION COLLISIONS
ION-MOLECULE COLLISIONS
IONS
MOLECULAR IONS
MOLECULE COLLISIONS
NONMETALS
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PLASMA
PLASMA ARC SPRAYING
POLYMERIZATION
RADICALS
RUTHERFORD SCATTERING
SCATTERING
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON OXIDES
SPECTRA
SPRAY COATING
SPRAYED COATINGS
SPUTTERING
SURFACE COATING
SURFACE FINISHING
X-RAY SPECTRA
YIELDS