Electrical conductivity of ion implanted polyimide
- Inst. of Chemical Technology, Prague (Czech Republic)
- Czech Academy of Sciences, Rez (Czech Republic). Inst. of Nuclear Physics
The samples of polyimide (PI) Upilex{sup R} were implanted with 10{sup 14} to 10{sup 17} cm{sup {minus}2} N{sup +} ions at 90 keV and subsequently chlorinated. The UV-visible spectra, Rutherford backscattering (RBS) spectra, and sheet resistance were studied on the modified PI samples. The electrical conductivity of the PI samples was found to be an increasing function of the implanted dose. The electrical conductivity of the PI sample implanted with the ion dose of 10{sup 17} cm{sup {minus}2} is about ten orders of magnitude higher than that of the pristine PI. An additional conductivity increase by a factor two was observed after subsequent chlorination. The enhanced electrical conductivity is related to the production of conjugated double bonds, and, for higher implanted doses, it is also related to the creation of carbonized domains in the sample surface layer. RBS analysis shows that the chlorine content in a 150 nm thick surface layer increases, and it reaches a maximum for 10{sup 15} cm{sup {minus}2} implanted dose. For higher doses, however, the chlorine content declines. The measured concentration depth profile of chlorine incorporated in the simple surface layer was analyzed assuming simultaneous diffusion and chemical reaction.
- Sponsoring Organization:
- USDOE
- OSTI ID:
- 61510
- Journal Information:
- Journal of the Electrochemical Society, Journal Name: Journal of the Electrochemical Society Journal Issue: 2 Vol. 142; ISSN 0013-4651; ISSN JESOAN
- Country of Publication:
- United States
- Language:
- English
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