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Raman spectroscopic study of Ag-, W- and Pd-ions implanted polyimide films

Book ·
OSTI ID:375962
 [1]; ;  [2]
  1. Gakushuin Univ., Toshima, Tokyo (Japan). Faculty of Science
  2. Inst. of Physical and Chemical Research, Wako, Saitama (Japan)

A study has been made of the carbon formation in the surface layer of Ag-, W- and Pd-ions implanted polyimide films. The doses of 130 keV Ag-ions and 190 keV W-ions ranged from 1 {times} 10{sup 16} to 5 {times} 10{sup 17} atoms/cm{sup 2}. The doses of 100 keV Pd-ions ranged from 5 {times} 10{sup 16} to 2 {times} 10{sup 17} atoms/cm{sup 2}. The carbon structure in implanted layers was characterized by laser Raman spectroscopy (LRS). Non-implanted polyimide film has very strong intensity of fluorescence, and the intensity of all W-, Ag- and Pd-ions implanted specimens decreases with the increase in dose. The intensity of Raman spectra for both W- and Ag-ions implanted specimens increases with the increase in dose. For Pd-ion implanted specimens, the Raman spectrum of carbon is hardly observed even with a high dose. Raman spectra for W- or Ag-ions implanted specimens with a high dose show that the diamond-like carbon (DLC) exist in the implanted layers. It is found that the DLC structures in the W- and Ag-ions implanted layers have graphite-like and amorphous-like structures, respectively. The authors propose that transparency carbon structure in implanted layers is generated by Pd-ion implantation. It is concluded that marked DLC formation in surface layer of polyimide films can be caused by Ag- or W-ions implantation except Pd-ion implantation, and carbon structure in implanted layers depends strongly on the implanted elements.

OSTI ID:
375962
Report Number(s):
CONF-941144--; ISBN 1-55899-255-3
Country of Publication:
United States
Language:
English

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