Plasma oxidation of CF/sub 4/ in a tubular-alumina fast-flow reactor
Mass-spectrometric analyses were made of the plasma reactions of 50-W CF/sub 4/ and CF/sub 4/-O/sub 2/ discharges as functions of pressure (0.15--0.6 Torr), flow rate (2--80 cm/sup 3//min) or the O/sub 2/ level in the feed. Discharges were investigated both in the presence and absence of single-crystal Si. The products from CF/sub 4/ alone were F, F/sub 2/, and C/sub 2/F/sub 6/; in the presence of Si the products were SiF/sub 4/, C/sub 2/F/sub 6/, and small amounts of F. The products from CF/sub 4/-O/sub 2/ were F, F/sub 2/, COF/sub 2/, CO/sub 2/, and CO; in the presence of Si the products were SiF/sub 4/, F, F/sub 2/, COF/sub 2/, CO/sub 2/, and CO. The conversion of CF/sub 4/ to products increased monotonically with residence time in the discharge and the O/sub 2/ concentration in the feed. It appears that F/sub 2/ was produced in the plasma zone and that the SiF/sub x/ (x<4) species reacted with F/sub 2/ to give SiF/sub 4/.
- Research Organization:
- Bell Laboratories, Murray Hill, New Jersey 07974
- OSTI ID:
- 6145538
- Journal Information:
- J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 50:7; ISSN JAPIA
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
700100* -- Fusion Energy-- Plasma Research
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
CARBON TETRAFLUORIDE
CHALCOGENIDES
CHEMICAL REACTIONS
CRYOGENIC FLUIDS
CRYSTALS
ELECTRIC DISCHARGES
ELEMENTS
FLUIDS
FLUORINATED ALIPHATIC HYDROCARBONS
FLUORINE
HALOGENATED ALIPHATIC HYDROCARBONS
HALOGENS
MASS SPECTROSCOPY
MEDIUM VACUUM
MONOCRYSTALS
NONMETALS
ORGANIC COMPOUNDS
ORGANIC FLUORINE COMPOUNDS
ORGANIC HALOGEN COMPOUNDS
OXIDATION
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PLASMA
PRESSURE DEPENDENCE
SPECTROSCOPY
TUBES