Creation of interface states at the silicon/silicon dioxide interface by uv light without hole trapping
Photoinjection of electrons into silicon dioxide in metal-oxide-semiconductor (MOS) capacitors with 3.5 eV light is shown to create interface states with no apparent hole trapping precursor. The creation rate of these interface states depends strongly upon whether injection is from the gate metal or the silicon substrate, and on the forming gas annealing sequence used to passivate growth-induced interface states. A mechanism involving electron-induced release of hydrogen in the oxides is consistent with some aspects of the data. 10 refs., 4 figs.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (USA)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 6129563
- Report Number(s):
- SAND-88-2920C; CONF-890426-3; ON: DE89010328
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
14 SOLAR ENERGY
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
CAPACITORS
CHALCOGENIDES
CONCENTRATOR SOLAR CELLS
DIRECT ENERGY CONVERTERS
ELECTRICAL EQUIPMENT
ELECTROMAGNETIC RADIATION
EQUIPMENT
FABRICATION
GROWTH
INTERFACES
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
RADIATIONS
SILICON COMPOUNDS
SILICON OXIDES
SOLAR CELLS
SOLAR EQUIPMENT
SUBSTRATES
ULTRAVIOLET RADIATION
140501* -- Solar Energy Conversion-- Photovoltaic Conversion
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
CAPACITORS
CHALCOGENIDES
CONCENTRATOR SOLAR CELLS
DIRECT ENERGY CONVERTERS
ELECTRICAL EQUIPMENT
ELECTROMAGNETIC RADIATION
EQUIPMENT
FABRICATION
GROWTH
INTERFACES
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
RADIATIONS
SILICON COMPOUNDS
SILICON OXIDES
SOLAR CELLS
SOLAR EQUIPMENT
SUBSTRATES
ULTRAVIOLET RADIATION