RF sputtered silicon and hafnium nitrides as applied to 440C steel
Technical Report
·
OSTI ID:6123729
Silicon nitride and hafnium nitride coatings were deposited on oxidized and unoxidized 440C stainless steel substrates. Sputtering was done in mixtures of argon and nitrogen gases from pressed powder silicon nitride and from hafnium metal targets. The coatings and the interface between the coating and substrate were investigated by X-ray diffractometry, scanning electron microscopy, energy dispersive X-ray analysis and Auger electron spectroscopy. Oxide was found at all interfaces with an interface width of at least 600 A for the oxidized substrates and at least 300 A for the unoxidized substrates. Scratch test results demonstrate that the adhesion of hafnium nitride to both oxidized and unoxidized 440C is superior to that of silicon nitride. Oxidized 440C is found to have increased adhesion, to both nitrides, over that of unoxidized 440C. Coatings of both nitrides deposited at 8 mtorr were found to have increased adhesion to both oxidized and unoxidized 440C over those deposited at 20 mtorr.
- Research Organization:
- National Aeronautics and Space Administration, Cleveland, OH (USA). Lewis Research Center
- OSTI ID:
- 6123729
- Report Number(s):
- N-84-32536; NASA-TM-86862; E-1993
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
ADHESION
ALLOYS
CHALCOGENIDES
CHROMIUM ALLOYS
COATINGS
COHERENT SCATTERING
CORROSION RESISTANT ALLOYS
CRYSTAL STRUCTURE
DIFFRACTION
HAFNIUM COMPOUNDS
HAFNIUM NITRIDES
HARDNESS
IRON ALLOYS
IRON BASE ALLOYS
MECHANICAL PROPERTIES
MICROHARDNESS
MICROSTRUCTURE
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
REFRACTORY METAL COMPOUNDS
SCATTERING
SILICON COMPOUNDS
SILICON NITRIDES
SPUTTERING
STAINLESS STEELS
STEELS
SUBSTRATES
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION
360101* -- Metals & Alloys-- Preparation & Fabrication
ADHESION
ALLOYS
CHALCOGENIDES
CHROMIUM ALLOYS
COATINGS
COHERENT SCATTERING
CORROSION RESISTANT ALLOYS
CRYSTAL STRUCTURE
DIFFRACTION
HAFNIUM COMPOUNDS
HAFNIUM NITRIDES
HARDNESS
IRON ALLOYS
IRON BASE ALLOYS
MECHANICAL PROPERTIES
MICROHARDNESS
MICROSTRUCTURE
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
REFRACTORY METAL COMPOUNDS
SCATTERING
SILICON COMPOUNDS
SILICON NITRIDES
SPUTTERING
STAINLESS STEELS
STEELS
SUBSTRATES
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION