Role of atomic oxygen in the low-temperature growth of YBa/sub 2/Cu/sub 3/O/sub 7-//sub delta/ thin films by laser ablation deposition

Journal Article · Mon May 08 04:00:00 EDT 1989 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.101496· OSTI ID:6114726

Koren, G; Gupta, A; Baseman, R J

Thin films of YBa/sub 2/Cu/sub 3/O/sub 7-//sub delta/ were deposited on (100) SrTiO/sub 3/ substrates held at 600 and 700 /sup 0/C in N/sub 2/O and O/sub 2/ ambients using 355 nm Nd-YAG laser pulses for ablation of the target. The experiments were done either in the presence or absence of 193 nm excimer laser irradiation of the ambient gas between the target and the substrate. Results without the excimer irradiation show that in 0.2 Torr of both N/sub 2/O and O/sub 2/, at 700 /sup 0/C substrate surface temperature, excellent smooth films with T/sub c/ (R = 0) of 93 K and J/sub c/ (88 K) of 1.3 x 10/sup 6/ A/cm/sup 2/ were obtained. At 600 /sup 0/C, semiconducting films with no superconducting transition were obtained in O/sub 2/ ambient, whereas in N/sub 2/O, semiconducting normal state behavior with broad superconducting transition was found. With the 193 nm irradiation, no change was observed in the electrical properties of the films deposited in O/sub 2/ at 600 /sup 0/C, whereas in N/sub 2/O reasonably good superconducting films with normal metallic behavior and T/sub c/ (R = 0) of 84 K were found. Since the 193 nm photons hardly dissociate O/sub 2/ molecules, but very efficiently photodissociate the N/sub 2/O molecules to form N/sub 2/ and O(/sup 1/D), it is concluded that the atomic oxygen produced by photodissociation of N/sub 2/O is responsible for the superconducting film deposition at 600 /sup 0/C.

• Research Organization: IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598
• OSTI ID: 6114726
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 54:19; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
656100 -- Condensed Matter Physics-- Superconductivity
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ABLATION
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CURRENTS
ELECTRIC CONDUCTIVITY
ELECTRIC CURRENTS
ELECTRICAL PROPERTIES
ELEMENTS
EXCIMER LASERS
FABRICATION
FILMS
GAS LASERS
HIGH TEMPERATURE
LASERS
LOW TEMPERATURE
NITROGEN COMPOUNDS
NITROGEN OXIDES
NITROUS OXIDE
NONMETALS
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
STRONTIUM COMPOUNDS
STRONTIUM OXIDES
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
THERMODYNAMIC PROPERTIES
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM OXIDES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
VERY LOW TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES