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Laser deposition of YBa/sub 2/Cu/sub 3/O/sub 7-//sub delta/ thin films

Conference · · AIP Conf. Proc.; (United States)
OSTI ID:6910836
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Depositions were performed from bulk targets of nominal composition YBa/sub 2/Cu/sub 3/O/sub 7-//sub delta/ by CO/sub 2/ laser evaporation and excimer laser ablation. The substrates selected were Al/sub 2/O/sub 3/ and SrTiO/sub 3/. The principal deposition parameters varied were substrate temperature and O/sub 2/ pressure. The resulting films were characterized by XPS and resistivity measurements. For the best film, the superconducting onset temperature was 95 K with completion by 62 K. This film was deposited by excimer laser onto a SrTiO/sub 3/ substrate at 440/sup 0/C in 2 mTorr of O/sub 2/. Some anomalous low temperature resistivity behavior in the thinner films (<440 nm) or SrTiO/sub 3/ is also described.

Research Organization:
Electro-Optics Department, IIT Research Institute, Chicago, IL 60616
OSTI ID:
6910836
Report Number(s):
CONF-871178-
Journal Information:
AIP Conf. Proc.; (United States), Journal Name: AIP Conf. Proc.; (United States) Vol. 165:1; ISSN APCPC
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
&amp; Refractories-- Preparation &amp; Fabrication
360204 -- Ceramics
Cermets
&amp; Refractories-- Physical Properties
ABLATION
ALKALINE EARTH METAL COMPOUNDS
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
AMORPHOUS STATE
BARIUM COMPOUNDS
CARBON DIOXIDE LASERS
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DIMENSIONS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
ELECTRON SPECTROSCOPY
ELEMENTS
EVAPORATION
EXCIMER LASERS
FILMS
GAS LASERS
IONIZING RADIATIONS
LASER-PRODUCED PLASMA
LASERS
LOW TEMPERATURE
NONMETALS
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
PHOTOELECTRON SPECTROSCOPY
PHYSICAL PROPERTIES
PLASMA
PRESSURE DEPENDENCE
RADIATIONS
SPECTROSCOPY
STRONTIUM COMPOUNDS
STRONTIUM TITANATES
SUPERCONDUCTING FILMS
TEMPERATURE DISTRIBUTION
THICKNESS
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
X RADIATION
YTTRIUM COMPOUNDS